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Product Identifiers

PublisherPearson Education

ISBN-100130850373

ISBN-139780130850379

eBay Product ID (ePID)1624455

Product Key Features

Number of Pages832 Pages

LanguageEnglish

Publication NameSilicon Vlsi Technology : Fundamentals, Practice, and Modeling

Publication Year2000

SubjectElectronics / Semiconductors, Electronics / Circuits / Vlsi & Ulsi, Electronics / General, Chemistry / General

TypeTextbook

AuthorMichael Deal

Subject AreaTechnology & Engineering, Science

FormatTrade Paperback

Dimensions

Item Height1.8 in

Item Weight48.8 Oz

Item Length9 in

Item Width7.3 in

Additional Product Features

Intended AudienceCollege Audience

LCCN99-042745

IllustratedYes

Table Of Content(NOTE: Chapters 3-11 include an Introduction, Historical Development and Basic Concepts, Manufacturing Methods and Equipment, Measurement Methods, Models and Simulation, Limits and Future Trends in Technologies and Models, Summary of Key Ideas, References, and Problems.) 1. Introduction and Historical Perspective. Introduction. Integrated Circuits and the Planar Process--Key Inventions That Made It All Possible. Semiconductors. Semiconductor Devices. Semiconductor Circuit Families. Modern Scientific Discovery--Experiments, Theory and Computer Simulation. The Plan for This Book. 2. Modern CMOS Technology. CMOS Process Flow. 3. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. 4. Semiconductor Manufacturing-- Clean Rooms, Wafer Cleaning and Gettering. 5. Lithography. 6. Thermal Oxidation and the Si/SiO2 Interface. 7. Dopant Diffusion. 8. Ion Implantation. 9. Thin Film Deposition. 10. Etching. 11. Backend Technology.

SynopsisFor one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies., Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes., For one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technology with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies., For one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technologywith an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.

LC Classification NumberTK7874.75.P54 2000