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Product Identifiers

PublisherAmerican Chemical Society

ISBN-100841228485

ISBN-139780841228481

eBay Product ID (ePID)938058

Product Key Features

Number of Pages540 Pages

LanguageEnglish

Publication NameIntroduction to Microlithography

SubjectElectronics / Semiconductors, Chemistry / Physical & Theoretical, Chemistry / Organic, Industrial Technology

Publication Year1994

FeaturesRevised

TypeTextbook

Subject AreaTechnology & Engineering, Science

AuthorC. Grant Willson

SeriesAcs Professional Reference Book Ser.

FormatHardcover

Dimensions

Item Height1.4 in

Item Weight30.5 Oz

Item Length9.1 in

Item Width6.2 in

Additional Product Features

Edition Number2

Intended AudienceCollege Audience

LCCN93-042023

Dewey Edition20

Dewey Decimal621.3815/31

Edition DescriptionRevised edition

Table Of ContentL.F. Thompson: An Introduction to LithographyM.J. Bowden: The Lithographic Process: The PhysicsC.G. Willson: Organic Resist MaterialsL.F. Thompson: Resist ProcessingJ.A. Mucha, D.W. Hess, and E.S. Aydil: Plasma Etching

SynopsisUpdated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography., Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also proveinvaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography., Updated and expanded Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

LC Classification NumberTR940.I57 1994